Publication:

Advanced solutions for copper and low k technology

Date

2000

Presentation

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Author(s)

;

Baklanov, Mikhaïl

;

Brongersma, Sywert

;

De Roest, David

;

;

Grillaert, Joost

;

Lanckmans, Filip

;

Maenhoudt, Mireille

;

;

Richard, Emmanuel

;

Struyf, Herbert

;

Stucchi, Michele

;

;

Van Hove, Marleen

;

Statistics

2040 since deposited on 2021-10-14

Acq. date: 2026-09-10