Publication:

Advanced solutions for copper and low k technology

Date

2000
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Author(s)

Beyer, Gerald  
;
Baklanov, Mikhaïl
;
Brongersma, Sywert  
;
De Roest, David  
;
Donaton, R.
;
Grillaert, Joost
;
Lanckmans, Filip
;
Maenhoudt, Mireille
;
Maex, Karen  
;
Richard, Emmanuel
;
Struyf, Herbert  
;
Stucchi, Michele  
;
Tokei, Zsolt  
;
Van Hove, Marleen
;
Vervoort, Iwan

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2029 since deposited on 2021-10-14
Acq. date: 2025-10-22

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2029 since deposited on 2021-10-14
Acq. date: 2025-10-22

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