Browsing by author "Riedel, T."
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Application of moist ozone gas phase for removal of resist and organic contamination in a novel tank type processor
Wolke, K.; Riedel, T.; Haug, Rainer; De Gendt, Stefan; Heyns, Marc; Meuris, Marc (2000) -
From Piranha to Barracuda: mechanism of ozone and water vapor photoresistant strip in a wet bench
Riedel, T.; Wolke, K.; De Gendt, Stefan; Onsia, Bart (2001)