Browsing by author "Kissoon, Nicola"

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Actinic inspection of the EUV optical parameters of lithographic materials with lab-based radiometry and reflectometry

Dorney, Kevin; Kissoon, Nicola; Holzmeier, Fabian; Witting Larsen, Esben; Singh, Dhirendra; Arvind, Shikhar; Santra, Sayantani; Fallica, Roberto; Makhotkin, Igor; Philipsen, Vicky; De Gendt, Stefan; Fleischmann, Claudia; van der Heide, Paul; Petersen, John (2023-04-28)
E-TEST validation of EPE budget and metrology

De Poortere, Etienne; Schelcher, Guillaume; Kissoon, Nicola; Paolillo, Sara; Tabery, Cyrus; Halder, Sandip; Leray, Philippe; Mulkens, Jan; McManus, Moyra (2020)
Impact of sequential infiltration synthesis (SIS) on roughness and stochastic nano-failures for EUVL patterning

Vanelderen, Pieter; Blanco, Victor; Mao, Ming; Tomczak, Yoann; De Roest, David; Kissoon, Nicola; Rincon Delgadillo, Paulina; Rispens, Gijsbert; Schiffelers, Guido; Pathak, Abhinav; Lazzarino, Frederic; De Simone, Danilo; De Poortere, Etienne; Mc Manus, Moyra; Piumi, Daniele; Hendrickx, Eric; Vandenberghe, Geert (2019)