Browsing by author "Van Ber Biest, O."
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Thermostability of amorphous zirconium aluminate high-K layers
Zhao, Chao; Richard, Olivier; Young, Edward; Bender, Hugo; Roebben, G.; Haukka, S.; De Gendt, Stefan; Houssa, Michel; Carter, Richard; Tsai, Wilman; Van Ber Biest, O.; Heyns, Marc (2002)