Publication:

Thermostability of amorphous zirconium aluminate high-K layers

Date

2002
Journal article
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Author(s)

Zhao, Chao
;
Richard, Olivier  
;
Young, Edward
;
Bender, Hugo  
;
Roebben, G.
;
Haukka, S.
;
De Gendt, Stefan  
;
Houssa, Michel  
;
Carter, Richard
;
Tsai, Wilman
;
Van Ber Biest, O.
;
Heyns, Marc  

Journal

Journal of Non-Crystalline Solids

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2009 since deposited on 2021-10-15
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