Publication:

Thermostability of amorphous zirconium aluminate high-K layers

Date

2002
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Zhao, Chao
;
Richard, Olivier  
;
Young, Edward
;
Bender, Hugo  
;
Roebben, G.
;
Haukka, S.
;
De Gendt, Stefan  
;
Houssa, Michel  
;
Carter, Richard
;
Tsai, Wilman
;
Van Ber Biest, O.
;
Heyns, Marc  

Journal

Journal of Non-Crystalline Solids

Abstract

Description

Statistics

Views

2007 since deposited on 2021-10-15
3last month
1last week
Acq. date: 2026-03-17

Citations

Statistics

Views

2007 since deposited on 2021-10-15
3last month
1last week
Acq. date: 2026-03-17

Citations