Thermostability of amorphous zirconium aluminate high-K layers

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Author(s)

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Richard, Olivier

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De Gendt, Stefan

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Carter, Richard

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Van Ber Biest, O.

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Journal

Journal of Non-Crystalline Solids

Metrics

2000 since deposited on 2021-10-15

Acq. date: 2025-10-23