Publication:

Thermostability of amorphous zirconium aluminate high-K layers

Date

2002
Journal article
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dc.contributor.authorZhao, Chao
dc.contributor.authorRichard, Olivier
dc.contributor.authorYoung, Edward
dc.contributor.authorBender, Hugo
dc.contributor.authorRoebben, G.
dc.contributor.authorHaukka, S.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHoussa, Michel
dc.contributor.authorCarter, Richard
dc.contributor.authorTsai, Wilman
dc.contributor.authorVan Ber Biest, O.
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.date.accessioned2021-10-15T00:13:15Z
dc.date.available2021-10-15T00:13:15Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7100
dc.source.beginpage144
dc.source.endpage149
dc.source.issue1
dc.source.journalJournal of Non-Crystalline Solids
dc.source.volume303
dc.title

Thermostability of amorphous zirconium aluminate high-K layers

dc.typeJournal article
dspace.entity.typePublication
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