Browsing by author "Degel, Wolfgang"
Now showing items 1-2 of 2
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Compensating mask topography effects in CPL through-pitch solutions toward the 45nm node
Bekaert, Joost; Philipsen, Vicky; Vandenberghe, Geert; van den Broeke, Doug; Degel, Wolfgang; Zibold, Axel (2005) -
Image imbalance compensation in alternating phase-shift masks towards the 45 node through-pitch imaging
Van Look, Lieve; Kasprowicz, Bryan; Zibold, Axel; Degel, Wolfgang; Vandenberghe, Geert (2005)