Browsing by author "Lammers, J.H."

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A novel method for characterizing resist performance

Van Steenwinckel, David; Gronheid, Roel; Lammers, J.H.; Myers, Alan; Van Roey, Frieda; Willems, Patrick (2007)
Resolution, line width roughness and sensitivity in advanced photoresists

Van Steenwinckel, David; Gronheid, Roel; Lammers, J.H. (2008)