Browsing by author "Meeuwissen, Marieke"

Now showing items 1-1 of 1

Impact of acid statistics on EUV local critical dimension uniformity

Jiang, Jing; De Simone, Danilo; Yildirim, Oktay; Meeuwissen, Marieke; Hoefnagels, Rik; Rispens, Gijs; Derks, Paul; Custers, Rolf (2017)