Browsing by author "Collart, E.H."

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Co-implantation with conventional spike anneal solutions for 45 nm ultra-shallow junction formation

Collart, E.H.; Felch, S.B.; Graoui, H.; Kirkwood, D.; Pawlak, Bartek; Absil, Philippe; Severi, Simone; Janssens, Tom; Vandervorst, Wilfried (2005)