Authors

Collart, E.H.; Felch, S.B.; Graoui, H.; Kirkwood, D.; Pawlak, Bartek; Absil, Philippe; Severi, Simone; Janssens, Tom; Vandervorst, Wilfried

Conference

USJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors

Title

Co-implantation with conventional spike anneal solutions for 45 nm ultra-shallow junction formation

Publication type

Proceedings paper