Publication:
Co-implantation with conventional spike anneal solutions for 45 nm ultra-shallow junction formation
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1940 since deposited on 2021-10-16
2last month
Acq. date: 2025-12-10
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Metrics
Views
1940 since deposited on 2021-10-16
2last month
Acq. date: 2025-12-10
Citations