Browsing by author "Zhong, Ben"

Now showing items 1-1 of 1

A new ultra-low K ILD material based on organic-inorganic hybrid resins

Zhong, Ben; Meynen, Herman; Iacopi, Francesca; Weidner, Ken; Malhouitre, Stéphane; Moyer, Eric; Bargeron, Cory; Schalk, Paul; Peck, Alan; Van Hove, Marleen; Maex, Karen (2002)