Browsing by author "Kremer, Stephanie"
Now showing items 1-3 of 3
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In-line and nondestructive analysis of selectively grown epitaxial Si1-xGex and Si/Si1-xGex layers by spectroscopic ellipsometry and comparison with other established techniques
Loo, Roger; Sleeckx, Erik; Caymax, Matty; Blavier, G.; Kremer, Stephanie (2001) -
In-line and nondestructive analysis of selectively grown epitaxial Si1-xGex and Si/Si1-xGex layers by spectroscopic ellipsometry and comparison with other established techniques
Loo, Roger; Caymax, Matty; Blavier, G.; Kremer, Stephanie (2001) -
Optimization of scatterometry parameters for shallow trench isolation (STI) monitor
Leray, Philippe; Cheng, Shaunee; Kremer, Stephanie; Ercken, Monique; Pollentier, Ivan (2004)