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In-line and nondestructive analysis of selectively grown epitaxial Si1-xGex and Si/Si1-xGex layers by spectroscopic ellipsometry and comparison with other established techniques
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1950 since deposited on 2021-10-14
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Acq. date: 2025-10-25
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Metrics
Views
1950 since deposited on 2021-10-14
432item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations