Browsing by author "Anno, Yusuke"
Now showing items 1-2 of 2
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Patterning developments in spin-on hard mask systems for 30nm half pitch EUV technology
Truffert, Vincent; Pollentier, Ivan; Foubert, Philippe; Lazzarino, Frederic; Wilson, Chris; Ercken, Monique; Gronheid, Roel; Demuynck, Steven; Buch, Xavier; Anno, Yusuke (2012) -
Roughness and variability in EUV lithography: Who is to blame? (Part 1)
Vaglio Pret, Alessandro; Gronheid, Roel; Younkin, Todd; Winroth, Gustaf; Biafore, John; Anno, Yusuke; Hoshiko, Kenji; Constantoudis, Vassilios (2013)