Browsing by author "Lee, Se-Won"
Now showing items 1-1 of 1
-
Area selective atomic layer deposition of molybdenum films on nanoscale metal and metal nitride patterns
Lee, Se-Won; Kim, Moo-Sung; Lee, Changwon; Ivanov, Sergei; Delabie, Annelies; van der Veen, Marleen (2020)