Browsing by author "Nényei, Z."

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In situ gas analysis on an RTP tool with APIMS

Vereecke, Guy; Kondoh, Eiichi; Richardson, Paul; Maex, Karen; Heyns, Marc; Nényei, Z. (1998)
In-line ambient impurity measurement of a rapid thermal process chamber by using atmospheric pressure ionization mass spectrometer

Kondoh, Eiichi; Vereecke, Guy; Heyns, Marc; Maex, Karen; Gutt, T.; Nényei, Z. (1998)