Authors

Kondoh, Eiichi; Vereecke, Guy; Heyns, Marc; Maex, Karen; Gutt, T.; Nényei, Z.

Conference

Rapid Thermal and Integrated Processing VII

Title

In-line ambient impurity measurement of a rapid thermal process chamber by using atmospheric pressure ionization mass spectrometer

Publication type

Proceedings paper

Embargo date

9999-12-31