Browsing by author "Wittebrood, F."

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22nm node imaging and beyond: a comparison of EUV and ArFi double patterning

van Setten, Eelco; Mouraille, O.; Wittebrood, F.; Dusa, Mircea; van Ingen-Schenau, Koen; Finders, Jo; Feenstra, Kees; Bekaert, Joost; Laenens, Bart; Philipsen, Vicky; Ercken, Monique; Hendrickx, Eric; Vandenberghe, Geert (2010)
Single exposure EUV block downscaling for metal pitches below 32nm

Franke, Joern-Holger; Colsters, Paul; Bekaert, Joost; Hendrickx, Eric; Wittebrood, F.; Pathak, Abhinav; Schiffelers, Guido (2017)