Single exposure EUV block downscaling for metal pitches below 32nm

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Authors
Franke, Joern-Holger; Colsters, Paul; Bekaert, Joost; Hendrickx, Eric; Wittebrood, F.; Pathak, Abhinav; Schiffelers, Guido
Conference
15th Fraunhofer IISB Lithography Simulation Workshop
Title
Single exposure EUV block downscaling for metal pitches below 32nm
Publication type
Proceedings paper
Embargo date
9999-12-31
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