Publication:

Single exposure EUV block downscaling for metal pitches below 32nm

Date

2017

Proceedings Paper

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Files

37543.pdf 575.45 KB

Author(s)

Franke, Joern-Holger

;

;

;

Hendrickx, Eric

;

;

Pathak, Abhinav

;

Schiffelers, Guido

Statistics

1939 since deposited on 2021-10-24

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Acq. date: 2026-06-07