Browsing by author "Kapteyn, Henity"
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A Laboratory Light Source for Ultrafast Kinetics of EUV Exposure Processes and Ultra-Small Pitch Lithography
Cousin, Seth L.; Bargsten, Clayton; Rinard, Eric; Ward, Rod; Hosler, Erik; Petersen, Brennan; Kapteyn, Henity; Vanelderen, Pieter; Petersen, John; van der Heide, Paul (2020)