Browsing by author "Dattilo, Davide"
Now showing items 1-2 of 2
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Evaluation of Ta-Co alloys as novel high-k extreme ultraviolet mask absorber
Thakare, Devesh; Wu, Meiyi; Opsomer, Karl; Saadeh, Qais; Soltwisch, Victor; Naujok, Philipp; Detavernier, Christophe; Dattilo, Davide; Foltin, Markus; Goodyear, Andy; Cooke, Mike; Delabie, Annelies; Philipsen, Vicky (2023) -
Optimization of EUV reticle cleaning by evaluation of chemistries on wafer-based mimic test structures.
Pacco, Antoine; Dattilo, Davide; Jonckheere, Rik; Rip, Jens; Dietze, Uwe; Kruemberg, Jens; Holsteyns, Frank (2016)