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Evaluation of Ta-Co alloys as novel high-k extreme ultraviolet mask absorber
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Authors
Thakare, Devesh
;
Wu, Meiyi
;
Opsomer, Karl
;
Saadeh, Qais
;
Soltwisch, Victor
;
Naujok, Philipp
;
Detavernier, Christophe
;
Dattilo, Davide
;
Foltin, Markus
;
Goodyear, Andy
;
Cooke, Mike
;
Delabie, Annelies
;
Philipsen, Vicky
DOI
10.1117/1.JMM.22.2.024403
ISSN
1932-5150
Issue
2
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
Volume
22
Title
Evaluation of Ta-Co alloys as novel high-k extreme ultraviolet mask absorber
Publication type
Journal article
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Date
Summary
3
20.500.12860/42412.3
*
2024-03-12T09:48:35Z
validation by library/open access desk
1
20.500.12860/42412
2023-08-27T17:28:50Z
*Selected version
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