Evaluation of Ta-Co alloys as novel high-k extreme ultraviolet mask absorber

Thakare, Devesh; Wu, Meiyi; Opsomer, Karl; Saadeh, Qais; Soltwisch, Victor; Naujok, Philipp; Detavernier, Christophe; Dattilo, Davide; Foltin, Markus; Goodyear, Andy; Cooke, Mike; Delabie, Annelies; Philipsen, Vicky

doi:10.1117/1.JMM.22.2.024403

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Evaluation of Ta-Co alloys as novel high-k extreme ultraviolet mask absorber

Date

2023

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https://doi.org/10.1117/1.JMM.22.2.024403

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Detavernier, Christophe

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JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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897 since deposited on 2023-08-27

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Acq. date: 2026-02-25

Evaluation of Ta-Co alloys as novel high-k extreme ultraviolet mask absorber

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