Evaluation of Ta-Co alloys as novel high-k extreme ultraviolet mask absorber

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Author(s)

Thakare, Devesh

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Soltwisch, Victor

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Naujok, Philipp

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Detavernier, Christophe

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Dattilo, Davide

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Delabie, Annelies

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Philipsen, Vicky

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

Metrics

894 since deposited on 2023-08-27

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Acq. date: 2025-10-25