Browsing by author "Goodyear, Andy"
Now showing items 1-18 of 18
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A route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversion
Heyne, Markus; Marinov, Daniil; Braithwaite, Nicholas; Goodyear, Andy; de Marneffe, Jean-Francois; Cooke, Mike; Radu, Iuliana; Neyts, Erik C.; De Gendt, Stefan (2019) -
Advanced etching for nanodevices and 2D materials
de Marneffe, Jean-Francois; Cooke, Mike; Goodyear, Andy; Braithwaite, Nicolas; Sutton, Yvonne; Bowden, Mark; Altamirano Sanchez, Efrain; Zotovich, Alexey; El Otell, Ziad; Chan, BT; Knoll, Armin; Rawlings, Colin; Duerig, Urs; Spiesser, Martin; Kaestner, Marcus; Neuber, Christian; Rangelow, Ivo (2016) -
Atomic layer etching of amorphous Si on MoS2 for selectively patterned MX2 heterostructures
Heyne, Markus; Goodyear, Andy; de Marneffe, Jean-Francois; Cooke, Mike; Neyts, Erik; Radu, Iuliana; De Gendt, Stefan (2017) -
Atomic layer etching of amorphous silicon with selectivity towards MoS2
Heyne, Markus; Goodyear, Andy; de Marneffe, Jean-Francois; Cooke, Mike; Radu, Iuliana; Neyts, Erik C.; De Gendt, Stefan (2017) -
Atomic layer etching of amorphous silicon with selectivity towards MoS2 for novel MX2 heterostructure device concepts
Heyne, Markus; Goodyear, Andy; de Marneffe, Jean-Francois; Cooke, Mike; Neyts, Erik C.; Radu, Iuliana; De Gendt, Stefan (2017) -
Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask
Wu, Meiyi; de Marneffe, Jean-Francois; Opsomer, Karl; Detavernier, Christophe; Delabie, Annelies; Naujok, Philipp; Caner, Oezge; Goodyear, Andy; Cooke, Mike; Saadeh, Qais; Soltwisch, Victor; Scholze, Frank; Philipsen, Vicky (2021) -
Cryogenic etching vs P4 approaches: paths towards ultra-low damage integration of mesoporous oxide dielectric materials
de Marneffe, Jean-Francois; Zhang, Liping; Heyne, Markus; Krishtab, Mikhail; Goodyear, Andy; Cooke, Mike; Heylen, Nancy; Ciofi, Ivan; Wen, Liang Gong; Wilson, Chris; Rutigliani, Vito; Decoster, Stefan; Savage, Travis; Matsunaga, Koichi; Nafus, Kathleen; Boemmels, Juergen; Tokei, Zsolt; Baklanov, Mikhaïl (2014) -
Evaluation of Ta-Co alloys as novel high-k extreme ultraviolet mask absorber
Thakare, Devesh; Wu, Meiyi; Opsomer, Karl; Saadeh, Qais; Soltwisch, Victor; Naujok, Philipp; Detavernier, Christophe; Dattilo, Davide; Foltin, Markus; Goodyear, Andy; Cooke, Mike; Delabie, Annelies; Philipsen, Vicky (2023) -
Low damage cryogenic etching of low-k materials for advanced interconnects
Baklanov, Mikhaïl; Zhang, Liping; de Marneffe, Jean-Francois; Dussart, Remi; Goodyear, Andy (2014) -
Low-damage cryogenic etch of porous organosilicate low-k dielectric
Zhang, Liping; Goodyear, Andy; Cooke, Mike; de Marneffe, Jean-Francois; De Gendt, Stefan; Baklanov, Mikhaïl (2015) -
Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation
Zhang, Liping; de Marneffe, Jean-Francois; Leroy, Florian; Lefaucheux, Philippe; Tillocher, Thomas; Dussart, Remi; Maekawa, Kaoru; yatsuda, koichi; Dussarrat, Christian; Goodyear, Andy; Cooke, Mike; De Gendt, Stefan; Baklanov, Mikhaïl (2016) -
Paths towards low-damage etching of highly porous organo-silicate low-k dielectrics
de Marneffe, Jean-Francois; Zhang, Liping; Watanabe, Mitsuhiro; yatsuda, koichi; Maekawa, Kaoru; Cooke, Mike; Goodyear, Andy; Leroy, Floriane; Tillocher, Thomas; Lefaucheux, Philippe; Dussart, Remi; Dussarat, Christian; Baklanov, Mikhaïl (2016) -
Photoresist treatment using an ICP H2 plasma and low ESC temperature: LWR study
De Schepper, Peter; Altamirano Sanchez, Efrain; Goodyear, Andy; El Otell, Ziad; de Marneffe, Jean-Francois; De Gendt, Stefan (2014) -
Photoresist treatment using an ICP H2 plasma and low ESC temperature: LWR study
De Schepper, Peter; Altamirano Sanchez, Efrain; Goodyear, Andy; El Otell, Ziad; de Marneffe, Jean-Francois; De Gendt, Stefan (2014) -
Selective patterning of amorphous silicon on MoS2 for enabling transition-metal dichalcogenide heterostructures
Heyne, Markus; de Marneffe, Jean-Francois; Goodyear, Andy; Cooke, Mike; Radu, Iuliana; Neyts, Erik C.; De Gendt, Stefan (2017) -
Selective patterning of amorphous silicon on MoS2 to fabricate transition-metal dichalcogenide heterostructures
Heyne, Markus; Goodyear, Andy; de Marneffe, Jean-Francois; Cooke, Mike; Radu, Iuliana; Neyts, Erik C.; De Gendt, Stefan (2017) -
Ultra-low damage integration of k= 2.3 periodic mesoporous oxide dielectric material using cryogenic etching
de Marneffe, Jean-Francois; Zhang, Liping; Krishtab, Mikhail; Goodyear, Andy; Cooke, Mike; Heylen, Nancy; Ciofi, Ivan; Wen, Liang Gong; Wilson, Chris; Savage, Travis; Matsunaga, Koichi; Nafus, Kathleen; Boemmels, Juergen; Tokei, Zsolt; Baklanov, Mikhaïl (2014) -
Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics
de Marneffe, Jean-Francois; Zhang, Liping; Heyne, Markus; Lukaszewicz, Mikolasj; Porter, Stephen Barry; Vajda, Felim; Rutigliani, Vito; Krishtab, Mikhail; Goodyear, Andy; Cooke, Mike; Verdonck, Patrick; Baklanov, Mikhaïl (2015)