Publication:

Paths towards low-damage etching of highly porous organo-silicate low-k dielectrics

Date

2016

Presentation

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Author(s)

de Marneffe, Jean-Francois

;

;

Watanabe, Mitsuhiro

;

yatsuda, koichi

;

;

;

;

Leroy, Floriane

;

Tillocher, Thomas

;

Lefaucheux, Philippe

;

;

Dussarat, Christian

;

Baklanov, Mikhaïl

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Acq. date: 2026-08-08