Paths towards low-damage etching of highly porous organo-silicate low-k dielectrics

Thumbnail
Metadata
Show full item record
Authors
de Marneffe, Jean-Francois; Zhang, Liping; Watanabe, Mitsuhiro; yatsuda, koichi; Maekawa, Kaoru; Cooke, Mike; Goodyear, Andy; Leroy, Floriane; Tillocher, Thomas; Lefaucheux, Philippe; Dussart, Remi; Dussarat, Christian; Baklanov, Mikhaïl
Conference
SPIE Advanced Lithography Conference
Title
Paths towards low-damage etching of highly porous organo-silicate low-k dielectrics
Publication type
Oral presentation
Collections