Atomic layer etching of amorphous silicon with selectivity towards MoS2

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Authors
Heyne, Markus; Goodyear, Andy; de Marneffe, Jean-Francois; Cooke, Mike; Radu, Iuliana; Neyts, Erik C.; De Gendt, Stefan
Conference
International Atomic Layer Etching Workshop - ALE
Title
Atomic layer etching of amorphous silicon with selectivity towards MoS2
Publication type
Meeting abstract
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