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Atomic layer etching of amorphous silicon with selectivity towards MoS2
Publication:
Atomic layer etching of amorphous silicon with selectivity towards MoS2
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Date
2017
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Heyne, Markus
;
Goodyear, Andy
;
de Marneffe, Jean-Francois
;
Cooke, Mike
;
Radu, Iuliana
;
Neyts, Erik C.
;
De Gendt, Stefan
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2145
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Acq. date: 2025-12-15
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Metrics
Views
2145
since deposited on 2021-10-24
2
last month
1
last week
Acq. date: 2025-12-15
Citations