Publication:

Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics

Date

2015
Journal article
https://doi.org/10.1063/1.4932202
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31809.pdf 1.13 MB

Author(s)

de Marneffe, Jean-Francois  
;
Zhang, Liping  
;
Heyne, Markus
;
Lukaszewicz, Mikolasj
;
Porter, Stephen Barry
;
Vajda, Felim
;
Rutigliani, Vito  
;
Krishtab, Mikhail  
;
Goodyear, Andy
;
Cooke, Mike
;
Verdonck, Patrick  
;
Baklanov, Mikhaïl

Journal

Journal of Applied Physics

Abstract

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