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A route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversion
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Authors
Heyne, Markus
;
Marinov, Daniil
;
Braithwaite, Nicholas
;
Goodyear, Andy
;
de Marneffe, Jean-Francois
;
Cooke, Mike
;
Radu, Iuliana
;
Neyts, Erik C.
;
De Gendt, Stefan
ISSN
2053-1583
Issue
3
Journal
2D Materials
Volume
6
Title
A route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversion
Publication type
Journal article
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