A route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversion

dc.contributor.author	Heyne, Markus
dc.contributor.author	Marinov, Daniil
dc.contributor.author	Braithwaite, Nicholas
dc.contributor.author	Goodyear, Andy
dc.contributor.author	de Marneffe, Jean-Francois
dc.contributor.author	Cooke, Mike
dc.contributor.author	Radu, Iuliana
dc.contributor.author	Neyts, Erik C.
dc.contributor.author	De Gendt, Stefan
dc.contributor.imecauthor	de Marneffe, Jean-Francois
dc.contributor.imecauthor	Radu, Iuliana
dc.contributor.imecauthor	De Gendt, Stefan
dc.contributor.orcidimec	Radu, Iuliana::0000-0002-7230-7218
dc.contributor.orcidimec	De Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned	2021-10-27T10:24:06Z
dc.date.available	2021-10-27T10:24:06Z
dc.date.issued	2019
dc.identifier.issn	2053-1583
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/33149
dc.identifier.url	https://doi.org/10.1088/2053-1583/ab1ba7
dc.source.beginpage	35030
dc.source.issue	3
dc.source.journal	2D Materials
dc.source.volume	6
dc.title	A route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversion
dc.type	Journal article
dspace.entity.type	Publication
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