Publication:
Atomic layer etching of amorphous Si on MoS2 for selectively patterned MX2 heterostructures
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1963 since deposited on 2021-10-24
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Acq. date: 2026-10-08
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1963 since deposited on 2021-10-24
2last month
2last week
Acq. date: 2026-10-08
Citations