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Conference contributions
Atomic layer etching of amorphous Si on MoS2 for selectively patterned MX2 heterostructures
Publication:
Atomic layer etching of amorphous Si on MoS2 for selectively patterned MX2 heterostructures
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Date
2017
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Heyne, Markus
;
Goodyear, Andy
;
de Marneffe, Jean-Francois
;
Cooke, Mike
;
Neyts, Erik
;
Radu, Iuliana
;
De Gendt, Stefan
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1956
since deposited on 2021-10-24
Acq. date: 2025-12-10
Citations
Metrics
Views
1956
since deposited on 2021-10-24
Acq. date: 2025-12-10
Citations