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Ultra-low damage integration of k= 2.3 periodic mesoporous oxide dielectric material using cryogenic etching
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1943 since deposited on 2021-10-22
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Acq. date: 2025-10-24
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Views
1943 since deposited on 2021-10-22
409item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations