Publication:
Ultra-low damage integration of k= 2.3 periodic mesoporous oxide dielectric material using cryogenic etching
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1950 since deposited on 2021-10-22
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Acq. date: 2026-08-04
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Statistics
Views
1950 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2026-08-04
Citations