Publication:
Ultra-low damage integration of k= 2.3 periodic mesoporous oxide dielectric material using cryogenic etching
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1945 since deposited on 2021-10-22
2last month
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Acq. date: 2025-12-09
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Views
1945 since deposited on 2021-10-22
2last month
2last week
Acq. date: 2025-12-09
Citations