Publication:

Advanced etching for nanodevices and 2D materials

Date

2016

Meeting abstract

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Author(s)

de Marneffe, Jean-Francois

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Braithwaite, Nicolas

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Altamirano Sanchez, Efrain

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Zotovich, Alexey

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Rawlings, Colin

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Spiesser, Martin

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Kaestner, Marcus

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Neuber, Christian

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Metrics

2013 since deposited on 2021-10-23

Acq. date: 2025-12-10