Publication:
Atomic layer etching of amorphous silicon with selectivity towards MoS2 for novel MX2 heterostructure device concepts
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1989 since deposited on 2021-10-24
2last month
Acq. date: 2026-06-01
Citations
Statistics
Views
1989 since deposited on 2021-10-24
2last month
Acq. date: 2026-06-01
Citations