Publication:
Atomic layer etching of amorphous silicon with selectivity towards MoS2 for novel MX2 heterostructure device concepts
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1987 since deposited on 2021-10-24
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Acq. date: 2026-04-26
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1987 since deposited on 2021-10-24
2last month
2last week
Acq. date: 2026-04-26
Citations