Authors

Heyne, Markus; Goodyear, Andy; de Marneffe, Jean-Francois; Cooke, Mike; Neyts, Erik C.; Radu, Iuliana; De Gendt, Stefan

Conference

10th Plasma Etch and Strip for Microtechnology Workshop - PESM

Title

Atomic layer etching of amorphous silicon with selectivity towards MoS2 for novel MX2 heterostructure device concepts

Publication type

Proceedings paper