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Atomic layer etching of amorphous silicon with selectivity towards MoS2 for novel MX2 heterostructure device concepts
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1981 since deposited on 2021-10-24
1last month
Acq. date: 2025-12-10
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Metrics
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1981 since deposited on 2021-10-24
1last month
Acq. date: 2025-12-10
Citations