Authors

Pacco, Antoine; Dattilo, Davide; Jonckheere, Rik; Rip, Jens; Dietze, Uwe; Kruemberg, Jens; Holsteyns, Frank

Conference

Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS

Title

Optimization of EUV reticle cleaning by evaluation of chemistries on wafer-based mimic test structures.

Publication type

Proceedings paper

Embargo date

9999-12-31