Browsing by author "Scheer, Steve"

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EUV RLS performance tradeoffs for a polymer bound PAG resist process

Rathsack, Ben; Hooge, Josh; Somervell, Mark; Scheer, Steve; Nafus, Kathleen; Shite, Hideo; Bradon, Neil; Kitano, Junichi; Gronheid, Roel; Vaglio Pret, Alessandro (2009)