Browsing by author "Dietrich, B."
Now showing items 1-6 of 6
-
Determination of stress in shallow trench isolation for deep submicron MOS devices by UV Raman spectroscopy
Dombrowski, Kai; Fischer, A.; Dietrich, B.; De Wolf, Ingrid; Bender, Hugo; Pochet, Sandrine; Simons, Veerle; Rooyackers, Rita; Badenes, Gonçal; Stuer, Cindy; Van Landuyt, J. (1999) -
Growth and properties of strained Si1-x-yGexCylayers
Jain, Suresh; Osten, H. J.; Dietrich, B.; Rücker, H. (1995) -
Investigation of stress in shallow trench isolation using UV micro-raman spectroscopy
Dombrowski, Kai; Dietrich, B.; De Wolf, Ingrid; Rooyackers, Rita; Badenes, Gonçal (2001) -
Investigation of stress in STI using UV-Raman spectroscopy
Dombrowski, Kai; Dietrich, B.; De Wolf, Ingrid; Rooyackers, Rita; Badenes, Gonçal (1999) -
Stress measurements using ultraviolet micro-Raman spectroscopy
Dombrowski, Kai; De Wolf, Ingrid; Dietrich, B. (1999) -
Stresses in strained GeSi stripes: calculation and determination from Raman measurements
Jain, Suresh; Dietrich, B.; Richter, H.; Atkinson, A.; Harker, A. H. (1995)