Browsing by author "Van Marcke, Pieter"

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FIB preparation of cross-sectional transmission electron microscopy specimens of unpassivated device structures

Bender, Hugo; Van Marcke, Pieter; Drijbooms, Chris; Roussel, Philippe (1997)
Focused ion beam preparation for cross-sectional transmission electron microscopy investigation of the top surface of unpassivated or partially processed ULSI devices

Bender, Hugo; Van Marcke, Pieter; Drijbooms, Chris; Roussel, Philippe (1998)