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Focused ion beam preparation for cross-sectional transmission electron microscopy investigation of the top surface of unpassivated or partially processed ULSI devices
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Focused ion beam preparation for cross-sectional transmission electron microscopy investigation of the top surface of unpassivated or partially processed ULSI devices
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Date
1998
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2595.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bender, Hugo
;
Van Marcke, Pieter
;
Drijbooms, Chris
;
Roussel, Philippe
Journal
Abstract
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1961
since deposited on 2021-09-30
Acq. date: 2025-12-18
Citations
Metrics
Views
1961
since deposited on 2021-09-30
Acq. date: 2025-12-18
Citations