Browsing by author "Van der Voort, Pascalr"

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Characterization of advanced k1.9, 2.0 and 2.2 ultra-porous SiOC(H) films deposited by plasma-enhanced chemical vapor deposition

Redzheb, Murad; Armini, Silvia; Baklanov, Mikhaïl; Van der Voort, Pascalr (2014)