Authors

Redzheb, Murad; Armini, Silvia; Baklanov, Mikhaïl; Van der Voort, Pascalr

Conference

Conference on Science and Applications of Thin Films - SATF

Title

Characterization of advanced k1.9, 2.0 and 2.2 ultra-porous SiOC(H) films deposited by plasma-enhanced chemical vapor deposition

Publication type

Meeting abstract