Browsing by author "Borden, Peter"

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Carrier illumination for characterization of ultra-shallow doping profiles

Clarysse, Trudo; Lindsay, Richard; Vandervorst, Wilfried; Budiarto, E.; Borden, Peter (2003)
On the sensitivity of carrier illumination to processing steps

Vandervorst, Wilfried; Clarysse, Trudo; Pawlak, Bartek; Budiarto, E.; Borden, Peter (2003)