Authors

Clarysse, Trudo; Lindsay, Richard; Vandervorst, Wilfried; Budiarto, E.; Borden, Peter

Conference

Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic.

Title

Carrier illumination for characterization of ultra-shallow doping profiles

Publication type

Proceedings paper