Browsing by author "Maxey, Kirby"

Now showing items 1-1 of 1

    • Advanced EUV patterning of 2D TMDs for CMOS integration 

      Faramarzi, Vina; de Poortere, Etienne; Venugopalan, Syam Parayil; Woltgens, Pieter; Woo, Youngtag; van de Kerkhof, Mark; Kumar, Pawan; Medina Silva, Henry; Morin, Pierre; Asselberghs, Inge; Dorow, Chelsey; O'Brien, Kevin; Maxey, Kirby; Avci, Uygar (2024)